Title:
Connection structure, magnetic annealing device using this, and connection method
Document Type and Number:
Japanese Patent JP6366515
Kind Code:
B2
Abstract:
Disclosed is a connection structure that connects a housing to a magnetic annealing furnace that is provided with a fixedly arranged magnet and includes a first drum flange having a cylindrical flange portion. The connection structure includes: a second drum flange that is attached and fixed to the housing and includes a flange portion configured to externally or internally fit the flange portion of the first drum flange thereto; a first sealant that is installed between facing surfaces of the housing and the second drum flange; and a second sealant that is installed between facing surfaces of the first and second drum flanges.
Inventors:
Ian Colgan
George Aires
Ivan Domusa
Junichi Sato
Kosuke Hasegawa
Tomoaki Abe
George Aires
Ivan Domusa
Junichi Sato
Kosuke Hasegawa
Tomoaki Abe
Application Number:
JP2015011743A
Publication Date:
August 01, 2018
Filing Date:
January 23, 2015
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; F27B17/00
Domestic Patent References:
| JP2014183281A | ||||
| JP2006210370A | ||||
| JP8088188A |
Foreign References:
| WO2014088414A1 | ||||
| US4751895 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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