Title:
LAMINATED PIEZO-ELECTRIC ELEMENT
Document Type and Number:
Japanese Patent JPH03270283
Kind Code:
A
Abstract:
PURPOSE:To improve the wear resistance and shock resistance of end faces of the upper and lower protective layer of the title element so that high reliability can be obtained when the element is used as a part of mechanical components by forming ceramic melt-sprayed coatings on the end faces of the protective layers. CONSTITUTION:Melt-sprayed coatings 9, which are ceramic coatings formed of a metallic oxide, metallic carbide, metallic carbide/metallic cermet, etc., by plasma melt spray, are formed on the end faces of the upper and lower protective layers 3 of this laminated piezo-electric element. When the coatings 9 are formed on the end faces of the layers 3 in such way, the coatings 9 having high hardness and toughness can prevent the end faces from wearing and cracking when stresses or impacts are repeatedly applied to the end faces. Therefore, the mechanical property of the end faces of the protective layers 3 can be improved and, even when a mechanical frictional force, compressive force, or impact force is applied to the layers 3, no crack and chipping occur in the layers 3, resulting in a laminated piezo-electric element having a long life and high reliability.
Inventors:
KAWAMURA YUKINORI
MATSUMOTO TOKUKATSU
KAMATAKI HIROTERU
MATSUMOTO TOKUKATSU
KAMATAKI HIROTERU
Application Number:
JP7120790A
Publication Date:
December 02, 1991
Filing Date:
March 20, 1990
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD
International Classes:
H01L41/083; H01L41/09; (IPC1-7): H01L41/09
Attorney, Agent or Firm:
Iwao Yamaguchi
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