Title:
LAMINATED PIEZOELECTRIC ELEMENT AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP3397753
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a laminated piezoelectric element, such as a lamination piezoelectric actuator element or the like in which insulation resistance of a piezoelectric layer will not deteriorate, even under high-humidity environment, humidity is superior, and reliability is high.
SOLUTION: In a laminated piezoelectric element 2, in which a piezoelectric layer 4 and internal electrode layers 6a, 6b are alternately laminated, the internal electrode layers 6a, 6b contain Au as essential components. Preferably, in the internal electrode layers 6a, 6b, at least one kind of element from among Pd, Pt and Rh is included. Preferably, when all weights % of a metal component in the internal electrode layers 6a, 6b are 100, the content of Au in the internal electrode layer is 20 to 90 wt.%. Preferably, a thickness of the internal electrode layers 6a, 6b is 1 to 3 μm.
Inventors:
Tatsuya Kojima
Kenji Horino
Kenji Horino
Application Number:
JP2000190654A
Publication Date:
April 21, 2003
Filing Date:
June 26, 2000
Export Citation:
Assignee:
TDK Co., Ltd.
International Classes:
B81B3/00; C04B35/00; H01L41/047; H01L41/083; H01L41/187; H01L41/22; H01L41/297; H01L41/43; H03H3/02; H03H9/17; (IPC1-7): H01L41/083; B81B3/00; C04B35/495; H01L41/187; H01L41/22
Domestic Patent References:
| JP212880A | ||||
| JP2000114611A |
Attorney, Agent or Firm:
Hitoshi Maeda (1 person outside)