Title:
着弾ドット測定方法および着弾ドット測定装置、並びに液滴吐出装置および電気光学装置の製造方法
Document Type and Number:
Japanese Patent JP4442620
Kind Code:
B2
Abstract:
A landed dot measuring method in which a topology measuring apparatus having an interferometer measures topology of a landed dot which is a functional liquid droplet landed on an inspection sheet when an inspection ejection for a functional liquid droplet ejection head is performed including: inspection-ejecting in which multiple ejection nozzles of a functional liquid droplet ejection head inspection-eject one by one at a time interval while the functional liquid droplet ejection head is moved in a main scanning direction relatively with respect to the inspection sheet and; and measuring in which respective topologies of multiple landed dots are measured while the topology measuring apparatus follows the functional liquid droplet ejection head and moves in the main scanning direction at a same speed as the functional liquid droplet ejection head relatively with respect to the inspection sheet.
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Inventors:
Hirofumi Sakai
Application Number:
JP2007045743A
Publication Date:
March 31, 2010
Filing Date:
February 26, 2007
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01B11/24; B05C5/00; B05C11/00; G01F22/00; G02B5/20; H01L51/50; H05B33/10
Domestic Patent References:
| JP2006136836A | ||||
| JP2005339816A | ||||
| JP2004071222A |
Attorney, Agent or Firm:
Minoru Ochiai