Title:
LASER BEAM IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2017131945
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a laser beam irradiation device capable of accurately checking a normal operation of a spatial light modulator during irradiation of a laser beam.SOLUTION: A laser machining device 200 comprises: a laser oscillator 310; a reflective spatial light modulator 410 for modulating a laser beam L generated at a laser oscillator 310, according to a phase pattern 9 of a liquid crystal layer 216 and emitting it; a spatial light modulator control part 502 for controlling the phase pattern 9; a condensing lens unit 430 for condensing the laser beams L emitted from the reflective spatial light modulator 410, onto an object 1 to be machined; and a profile acquisition camera 464 for acquiring an intensity distribution of the laser beams L emitted from the reflective spatial light modulator 410, and incident on the condensing lens unit 430. The spatial light modulator control part 502 displays, on the liquid crystal layer 216, the phase pattern 9 including a marking 9M modulating a part of the laser beams L that is not incident on an incident pupil surface 430a of the condensing lens unit 430.SELECTED DRAWING: Figure 17
Inventors:
OKUMA JUNJI
Application Number:
JP2016014510A
Publication Date:
August 03, 2017
Filing Date:
January 28, 2016
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
B23K26/00; B23K26/064; B23K26/53
Domestic Patent References:
| JP2011031284A | 2011-02-17 | |||
| JP2012501853A | 2012-01-26 | |||
| JP2012168333A | 2012-09-06 | |||
| JP2013132651A | 2013-07-08 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Arai Tohio
Yoshiki Kuroki
Kenichi Shibayama
Arai Tohio