LASER BEAM MACHINE AND DAM BAR MACHINING METHOD - HITACHI CONSTRUCTION MACHINERY

Title:

LASER BEAM MACHINE AND DAM BAR MACHINING METHOD

Document Type and Number:

Japanese Patent JPH09314371

Kind Code:

A

Abstract:

To provide a laser beam machine and a dam bar machining method capable of simultaneously cutting a dam bar, removing the resin in the dam, and removing the flash without deteriorating the machining efficiency, and capable of completely removing the resin in the dam and the flash.

A semi-conductor IC package of resin-integrated seal type is a work 12, and a dam bar is cut by the laser beam. The laser beam 10 is emitted from a laser beam oscillator 11, the laser beam 10 is split into the laser beam 10A, 10B by a beam splitter 141, the laser beam 10B is formed into the expanding beam using a concave lens 146, and superposed on the laser beam 10A, and the superposed laser beam is passed through a converging lens 145 and the work 12 is irradiated therewith.

Inventors:

MITSUYANAGI NAOKI
NAGANO YOSHIYA
SHIRAI TAKASHI
OKUMURA SHINYA
SHIMOMURA YOSHIAKI
SAKURAI SHIGEYUKI
MINOMOTO YASUSHI

Application Number:

JP13215696A

Publication Date:

December 09, 1997

Filing Date:

May 27, 1996

Export Citation:

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Assignee:

HITACHI CONSTRUCTION MACHINERY

International Classes:

B23K26/00; B23K26/064; B23K26/066; B23K26/067; B23K26/142; B23K26/16; H01L23/50; (IPC1-7): B23K26/06; B23K26/00; B23K26/14; B23K26/16; H01L23/50

Attorney, Agent or Firm:

春日讓

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