To provide a laser beam machining device and method for preventing machining waste from sticking to a laser beam emitting section arranged at the terminal of a laser waveguide means and accelerating machining and performing precision micromachining.
The laser beam machining device is equipped with: a laser light source 1 for generating a laser beam; a holder 3 for holding a workpiece 2; a container 4 in which the workpiece 2 and the holder 3 are immersed in a liquid; a laser waveguide means 5 for guiding a laser beam from the laser light source 1 to the workpiece 2; and a protective member 15 which is arranged between the laser beam emitting section 10 of the laser waveguide means 5 and the workpiece 2. The protective member 15 is composed of a material that transmits a laser beam.
FUKUNAGA YUKIO
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori
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