To provide a simultaneous multi-point laser beam micromachining device in which the convergence of a laser light is taken as a axis-like convergence and also a material to be worked can be machined simultaneously at multiple points by forming a plurality of the axis-like converging parts at the same time.
In the laser beam machining device with which the material to be worked is machined by using the converging parts which are high light-intensity parts converging the laser light, this laser beam machining device is provided with the converging means in which a plurality of the converging parts formed at the same time are the axis-like convergence. In this laser beam machining device, the converging means is a composite axicon with which a plurality of the converging parts by axis-like convergence are formed at the same time. Furthermore, in this laser beam machining device, a composite axicon is formed of an assembly of a plurality of conical lenses. Moreover, in this laser beam machining device, the composite axicon is a diffraction type optical device.
INOUE HISASHI
JP2000288766A | 2000-10-17 | |||
JPH04266492A | 1992-09-22 | |||
JP2002210730A | 2002-07-30 | |||
JPH06262379A | 1994-09-20 |