Title:
LASER BEAM-MACHINING DEVICE
Document Type and Number:
Japanese Patent JP2007125577
Kind Code:
A
Abstract:
To provide a laser beam-machining device in which the adhesion by being molten to a chuck table of an adhesive tape to which materials to be worked such as a wafer are stuck is prevented.
This device is a laser beam-machining device which has the chuck table having a holding surface for holding the wafer and a laser beam irradiating means with which the wafer held with the chuck table is irradiated with the laser beam. The device is provided with a protective sheet laying means which is mounted to the chuck table and has the protective sheet for covering the holding surface.
Inventors:
GENDA SATOSHI
NOMURA HIROSHI
NOMURA HIROSHI
Application Number:
JP2005319608A
Publication Date:
May 24, 2007
Filing Date:
November 02, 2005
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23K26/10
Domestic Patent References:
JP2004158859A | 2004-06-03 | |||
JP2000225485A | 2000-08-15 | |||
JPH0778864A | 1995-03-20 | |||
JPH1158061A | 1999-03-02 | |||
JP2005262249A | 2005-09-29 |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki
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