To adjust an optical axis of a laser beam so as to pass through a center of a condenser lens without moving the condenser lens.
In a configuration where the laser beam L emitted from an oscillator 42 reflects at a Y direction adjusting mirror 43, an X direction adjusting mirror 44 and an angle adjusting mirror 45 to be guided to the condenser lens 47, the Y direction adjusting mirror 43 is movably arranged in a Y direction and the X direction adjusting mirror 44 is movably arranged in an X direction, these mirrors 43, 44 are made to be moved, and the reflection angle of the laser beam L by the angle adjusting mirror 45 is adjusted as necessary so that adjustment for allowing the optical axis of the laser beam L to pass through the center of the condenser lens 47 is carried out. The optical axis of the laser beam L is moved, so that the optical axis of the laser beam L is passed through the center of the condenser lens 47 without moving the condenser lens 47.
HOSHINO HITOSHI
OBA TATSUGO
FUKUOKA TAKEOMI
AKITA SOICHIRO
JPH01154892A | 1989-06-16 | |||
JP2008055436A | 2008-03-13 | |||
JPH0825073A | 1996-01-30 | |||
JP2000208850A | 2000-07-28 | |||
JPH10326922A | 1998-12-08 |
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