Title:
LASER SCANNER
Document Type and Number:
Japanese Patent JP3435595
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce the number of parts, to facilitate assembly and to miniaturize and lighten it.
SOLUTION: This laser scanner is constituted so that Si substrates 31, 32 are overlapped each other, and a surface light emission laser 48 is arranged on the central part of the substrate 31, and a poly-silicon layer 35 is vapor grown on the substrate 32, and transparent parts 38 of a concentric ring like air gap are formed by etching processing, and a diffraction optical element 36 consisting of a Fresnel zone plate is formed, and its opaque parts 39 are connected by cross-shaped connection parts, and four points are supported by zigzag-shaped support springs 42, and an AC source 55 is connected between electrodes 51 and 52, and the electrode 51 is connected/formed on the support spring 42 and the optical element 36 also, and the element 36 is vibrated by electrostatic force. A spotlight image 54 of a laser beam vibration scans on a line 56.
Inventors:
Ryoji Kaku
Yoshimu Kato
Yoshimu Kato
Application Number:
JP26814598A
Publication Date:
August 11, 2003
Filing Date:
September 22, 1998
Export Citation:
Assignee:
Japan Aviation Electronics Industry Co., Ltd.
International Classes:
G06K7/10; G02B26/10; (IPC1-7): G02B26/10; G06K7/10
Domestic Patent References:
| JP764011A | ||||
| JP990259A |
Attorney, Agent or Firm:
Kusano Taku (1 person outside)