Title:
非線形光学現象を用いるレーザスキャニングウエハ検査
Document Type and Number:
Japanese Patent JP2004529327
Kind Code:
A
Abstract:
An optical inspection apparatus and method is provided that utilizes both linear and nonlinear optical phenomena to detect defects. Embodiments include irradiating a portion of the surface of an article, such as a semiconductor device, with a light beam, such as a scanning laser at an incident wavelength. The light emanating from the irradiated surface portion is then separated into light at the incident wavelength and light at one or more predetermined non-incident wavelengths, as by a diffraction grating, prism or filters. The light at the incident and nonincident wavelengths is sent to separate detectors, such as photomultipliers (PMT), which respectively convert the detected linear optical phenomena (representing, e.g., surface topography) into an electrical signal, and the detected nonlinear optical phenomena, such as fluorescence, Raman scattering and/or second harmonic generation, into electrical signals representing, e.g., chemical composition and material interfaces. The signal from each detector is sent to a processor, which generates a defect map based on the information gleaned from both the linear and nonlinear optical phenomena.
Inventors:
Zome, Daniel Eye.
Rheinhorn, Sylvie
Girado, Armoji
Rheinhorn, Sylvie
Girado, Armoji
Application Number:
JP2002564577A
Publication Date:
September 24, 2004
Filing Date:
February 13, 2002
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
G01N21/95; G01N21/956; H01L21/66; G01N21/64; G01N21/65; (IPC1-7): G01N21/956; H01L21/66
Domestic Patent References:
| JPS60135806A | 1985-07-19 | |||
| JPS60135807A | 1985-07-19 | |||
| JPH08261927A | 1996-10-11 | |||
| JPH11237344A | 1999-08-31 | |||
| JP2000346802A | 2000-12-15 |
Foreign References:
| US6067154A | 2000-05-23 |
Other References:
HIGGS V, PROCEEDINGS OF THE SPIE, vol. V3895, JPN6007010814, 13 September 1999 (1999-09-13), US, pages 21 - 37, ISSN: 0000940556
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Yasuhito Suzuki
Yuichi Yamada
Yasuhito Suzuki