To provide an apparatus and method that detects an actually scribed position while performing laser scribing and that performs feedback correction so as to approach a predetermined planned cutting line.

In the laser scribing apparatus, a heating beam composed of a laser beam is emitted so that a scribing line is formed along the predetermined planned cutting line on a substrate to be cut, and a coolant is sprayed. The apparatus uses: a scribing line generating position detection means which detects the generating position of the scribing line; a scribing position deviation calculating means which calculates deviation of the generating position of the scribing line with respect to the planned cutting line; and a scribing position changing means by which the generating position of the scribing line with respect to the planned cutting line can be changed. There is also provided a laser scribing method.