Title:
LASER SCRIBING DEVICE
Document Type and Number:
Japanese Patent JPS53108276
Kind Code:
A
Abstract:
PURPOSE:To prevent the splashes caused at the laser scribing time from sticking to the substrate, by providing an electrostatic dust collector mechanism near the substrate surface.
Inventors:
YAMAGISHI SOUKICHI
Application Number:
JP2317377A
Publication Date:
September 20, 1978
Filing Date:
March 02, 1977
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
B23K26/16; B08B6/00; H01L21/301; (IPC1-7): B23K26/00; B26F3/14; H01L21/302; H01L21/78