To provide a layered film whereby losses in gas-barrier performance when the film is bent can be sufficiently inhibited.
The layered film includes a substrate and one thin-film layer formed on at least one surface of the substrate. The thin-film layer contains silicon, oxygen, and carbon. A carbon distribution curve, which represents the relationship between the distance from the surface of the layer in the thickness direction thereof and the ratio of carbon atoms in the layer to the total number of silicon, oxygen, and carbon atoms (the atomic concentration of carbon) satisfies the following conditions: (i) the carbon distribution curve is essentially continuous; (ii) the atomic concentration of carbon is at least 1 atom% throughout the entire thickness of the layer; and (iii) the carbon distribution curve has a sloped region in which the atomic concentration of carbon is increasing and a sloped region in which the atomic concentration of carbon is decreasing.
KURODA TOSHIYA
SANADA TAKASHI
| JP2001310943A | 2001-11-06 | |||
| JP2006342423A | 2006-12-21 | |||
| JP2005088431A | 2005-04-07 | |||
| JPH07178860A | 1995-07-18 | |||
| JP2001310943A | 2001-11-06 |
| WO2008096616A1 | 2008-08-14 |
Naozumi Hiroyasu
Norihiko Ara
Hiroyuki Kato
Mitsunaga Igarashi
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