To provide a lid for a sheet supporting container wherein the lid is reliably fixed to the main body of the container, cleaning and dry of each part is facilitated, and rotation of a semiconductor wafer caused by vibration is suppressed.
A lid 15 for a manufacturing line for closing the main body of a sheet supporting container is provided. A simple mounting/dismounting mechanism 32 comprises: an engagement member 42 extended for engaging with the main body side of the container; a feed member 43 linked to the engagement member 42 for moving the member 42 in and out; a tip end side cam 40 for depressing the tip end side of the engagement member 42 in one direction when engagement member 42 is moved out by the feed member 43; a base end lower-side cam 39 for depressing the base end side in the other direction; a base end upper-side cam 53 for depressing the base end side in the other direction similarly to the base end lower-side cam 39; and a cam press projection 69. The simple mounting/dismounting mechanism 32, which is provided removably and disassemblably, comprises a supporting rib for supporting a connection supporting plate and a supporting annular projection which is formed to be thin in its both sides and to be thick in its central side.
OBAYASHI TADAHIRO
OYAMA TAKAHARU
| JPH0374610U | 1991-07-26 | |||
| JPH0714907A | 1995-01-17 | |||
| JP2001512288A | 2001-08-21 |
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