Title:
PRODUCTION OF INK JET HEAD
Document Type and Number:
Japanese Patent JP3230017
Kind Code:
B2
Abstract:
PURPOSE: To provide an ink jet head production method embodying a high degree of freedom in designing shapes of pressure chambers, nozzles, and others and a high machining accuracy.
CONSTITUTION: In a method for producing an ink jet head provided with nozzles 9 for jetting ink, pressure chambers 8 for generating a pressure for jetting ink particles from the nozzles 9, and ink supply paths for supplying ink to the pressure chambers 8, a process for forming a bonded substrate 5 is provided. In the process, a plurality of substrates 1, 4 are bonded to each other through an etching protective film 2 patterned into a nozzle shape. Furthermore, the following processes are provided: a process for forming the pressure chambers 8 by etching one surface of the bonded substrate 5 by using parts of the etching protective film 2 as an etching stop film, and a process for forming the nozzles 9 by continuing the etching of the bonded substrate by using the etching protective film 2 as an etching mask. In this case, a silicon single-crystal substrate is used for the substrates. The shapes of the pressure chambers, the nozzles, and others can be determined by different orientations.
Inventors:
Hideyuki Kikuchi
Application Number:
JP229893A
Publication Date:
November 19, 2001
Filing Date:
January 11, 1993
Export Citation:
Assignee:
富士通株式会社
International Classes:
B41J2/045; B41J2/055; B41J2/16; (IPC1-7): B41J2/16
Attorney, Agent or Firm:
Shoji Kashiwaya (1 person outside)