Title:
光照射装置、およびこれを備える露光装置
Document Type and Number:
Japanese Patent JP7257719
Kind Code:
B2
Abstract:
It is intended to provide a light emitting device for an exposure apparatus, whereby a photo-alignment process can be executed with a simple and convenient configuration. The present light emitting device (10) is composed of a light source (12), including a plurality of LEDs (16), and a polarizing element (14) that receives rays of light (L) emitted from the light source (12) and causes at least in part the rays of light (L) to transmit therethrough and be then incident on a work (X). Besides, each of the plurality of LEDs (16) has an optical axis (CL) tilting at a first angle (θ1) with respect to the work (X), whereas a second angle (θ2), defined as half of a light distribution angle of the rays of light (L) emitted from each of the plurality of LEDs (16), is set to be less than the first angle (θ1). Moreover, an illuminance and a cumulative illuminance of the rays of light (L) incident on the work (X) or an exposure surface (A) are adjusted by changing electricity to be inputted to the plurality of LEDs (16).
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Inventors:
Hiroshi Matsumoto
Tomohiko Inoue
Kenichi Yamashita
Tomohiko Inoue
Kenichi Yamashita
Application Number:
JP2022141322A
Publication Date:
April 14, 2023
Filing Date:
September 06, 2022
Export Citation:
Assignee:
Phoenix Electric Co., Ltd.
International Classes:
G02F1/1337; G02F1/13
Domestic Patent References:
| JP2018017952A | ||||
| JP2013084000A | ||||
| JP2018063831A | ||||
| JP2018101042A | ||||
| JP2013228533A | ||||
| JP2006323060A | ||||
| JP2016153920A | ||||
| JP2017072768A | ||||
| JP2011076033A | ||||
| JP2005109025A |
Foreign References:
| CN205229668U | ||||
| CN209014871U | ||||
| US20190204751 | ||||
| CN108803150A | ||||
| WO2015040664A1 |
Attorney, Agent or Firm:
Yuji Tada