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Title:
LIGHT SOURCE DEVICE
Document Type and Number:
Japanese Patent JP2013143253
Kind Code:
A
Abstract:

To provide a light source device ensuring a high utilization rate of light, for ultraviolet light of low wavelength radiated from a short arc flash lamp.

A short arc flash lamp comprises: a luminous tube provided, at both ends of a substantially spherical light-emitting section, with sealing portions elongating outward in the tube axis direction; a pair of discharge electrodes arranged in the light-emitting section to face each other in the tube axis direction; and a trigger electrode disposed so that the tip is located between the discharge electrodes. The light-emitting section is filled with an inert gas of 1×105 Pa or higher. The short arc flash lamp is further provided with a concave reflector disposed to surround the light-emitting section, and having a rotary elliptic or rotary parabolic light reflection surface. The light-emitting section is composed of a material having a refractive index of 1.55 or less for the light having a wavelength of 200 nm, and satisfies a relation 1/3≤b/a≤3, where a is the radius in the tube axis direction, and b is a radius in the direction perpendicular to the tube axis direction.


Inventors:
YAMAZAKI KENGO
Application Number:
JP2012002781A
Publication Date:
July 22, 2013
Filing Date:
January 11, 2012
Export Citation:
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Assignee:
USHIO ELECTRIC INC
International Classes:
H01J61/86; H01J61/12; H01J61/54; H01J61/90
Domestic Patent References:
JPH06314556A1994-11-08
JPH09171800A1997-06-30
JP2001155687A2001-06-08
JPS61233961A1986-10-18
JP2007109507A2007-04-26
JPH06314556A1994-11-08
JPH09171800A1997-06-30
JP2001155687A2001-06-08
Attorney, Agent or Firm:
Masahiko Oi



 
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