Title:
LIGHT SOURCE DEVICE
Document Type and Number:
Japanese Patent JP2023149176
Kind Code:
A
Abstract:
To provide a light source device capable of improving emission efficiency of plasma generated by an energy beam.SOLUTION: A light source device according to one embodiment of the present invention is a light source device that converts a liquid raw material into plasma using an energy beam and extracts radiation, and includes a rotating body, a raw material supply section, and a film thickness adjustment section. The rotating body has a groove portion arranged at a position where the energy beam is incident, and provided so as to overlap with an incident area of the energy beam. The raw material supply section supplies the liquid raw material to the groove portion. The film thickness adjustment section adjusts the film thickness of the liquid raw material so that a surface of the liquid raw material has a concave surface corresponding to the groove portion in the incident region of the energy beam.SELECTED DRAWING: Figure 1
Inventors:
TERAMOTO YUSUKE
Application Number:
JP2022057607A
Publication Date:
October 13, 2023
Filing Date:
March 30, 2022
Export Citation:
Assignee:
USHIO ELECTRIC INC
International Classes:
G03F7/20; H05G2/00
Attorney, Agent or Firm:
Patent Attorney Corporation Minami Aoyama International Patent Office