Title:
LIGHTWEIGHT HIGH RIGID CERAMIC MEMBER
Document Type and Number:
Japanese Patent JP2005203537
Kind Code:
A
Abstract:
To provide a lightweight high rigid ceramic member which is suitable for a member moving fast in a semiconductor manufacturing equipment, or the like.
The ceramic member 10 has a honeycomb structure member 13 having a plurality of columnar space 12 partitioned by a bulkhead 11, and a plate member 14. The aperture of the honeycomb structure member 13 is set to 3 mm to 20 mm, a Young's modulus of the bulkhead 11 is set to 200 GPa or more, and the thickness of the bulkhead 11 is set to 0.2 mm to 3 mm.
Inventors:
TSUTO HIROYUKI
TAKEI YOSHIBUMI
AOKI ICHIRO
HIKITA TOMOYUKI
SHIOGAI TATSUYA
TAKEI YOSHIBUMI
AOKI ICHIRO
HIKITA TOMOYUKI
SHIOGAI TATSUYA
Application Number:
JP2004007804A
Publication Date:
July 28, 2005
Filing Date:
January 15, 2004
Export Citation:
Assignee:
TAIHEIYO CEMENT CORP
International Classes:
H01L21/68; H01L21/027; (IPC1-7): H01L21/68; H01L21/027
Domestic Patent References:
| JPH05174520A | 1993-07-13 | |||
| JPH03131442A | 1991-06-05 | |||
| JP2003249542A | 2003-09-05 | |||
| JPH0894268A | 1996-04-12 | |||
| JPH0517227A | 1993-01-26 | |||
| JPS5165111A | 1976-06-05 | |||
| JPH11100275A | 1999-04-13 |
Attorney, Agent or Firm:
Hiroshi Takayama