Title:
液体吐出装置、ナノインプリント装置、ナノインプリント用液体収容タンク、硬化物パターンの製造方法、光学部品の製造方法、回路基板の製造方法、インプリント用モールドの製造方法
Document Type and Number:
Japanese Patent JP6870066
Kind Code:
B2
Abstract:
A liquid ejection device includes a storage section storing a nanoimprinting liquid and also includes an ejection port which communicates with the storage section and which ejects the nanoimprinting liquid. The storage section contains a sorption medium that adsorbs or absorbs at least one selected from the group consisting of particles, metal ions, and water. The sorption tedium is not ejected from the ejection port when the nanoimprinting liquid is ejected from the ejection port.
Inventors:
Toshiki Ito
Kazumi Sakamoto
Yoshimasa Araki
Kazumi Sakamoto
Yoshimasa Araki
Application Number:
JP2019227317A
Publication Date:
May 12, 2021
Filing Date:
December 17, 2019
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B05C9/12; B05C11/00; B05C11/10; B05D1/26; B05D3/06; B05D3/12; B05D7/24; B29C33/40; B29C59/02; B29D11/00; H05K3/06
Domestic Patent References:
| JP2006091805A | ||||
| JP2012094821A | ||||
| JP2014057016A | ||||
| JP2502443A | ||||
| JP2008041791A | ||||
| JP2014078562A |
Foreign References:
| US20100101493 | ||||
| WO2012096071A1 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa