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Title:
LIQUID DROP DELIVERY APPARATUS, CONTROL METHOD FOR LIQUID DROP DELIVERY APPARATUS, MANUFACTURING METHOD FOR ELECTO-OPTICAL APPARATUS, ELECTO-OPTICAL APPARATUS AND ELECTRONIC EQUIPMENT
Document Type and Number:
Japanese Patent JP2007152257
Kind Code:
A
Abstract:

To provide a liquid drop delivery apparatus capable of certainly wetting/spreading out a function liquid to the whole area of respective picture element range on a substrate by a simple structure.

The apparatus is provided with a drawing means for delivering/depositing the function liquid onto a large number of picture element ranges 507a on the substrate W partitioned by a bank part 507b while relatively moving the function liquid drop delivery head 17 introducing the function liquid; a gas blowing out port 81 facing to the substrate W following the function liquid drop delivery head 17 relatively moved accompanied with delivery of the function liquid and acting a liquid surface of the function liquid deposited on the respective picture element ranges 507 by blowing the gas onto the substrate W; and a gas feeding out means continued to the gas blowing out port 81.


Inventors:
ITO YOSHIHIRO
Application Number:
JP2005352656A
Publication Date:
June 21, 2007
Filing Date:
December 06, 2005
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
B05C5/00; B05C9/12; B05D1/26; G02B5/20
Attorney, Agent or Firm:
Minoru Ochiai