To provide a liquid drop discharging apparatus and a method for the same capable of efficiently carrying out workpiece treatment by enabling various liquid drop discharge of a functional liquid without causing the degradation of printing quality, and to provide a film forming apparatus, a film forming method, a device manufacturing method and an electronic equpment.
The liquid drop discharging apparatus is equipped with multiple types of liquid drop discharging heads 8 (a 1st discharging head 8a-3rd discharging head 8c) having mutually different specifications, a plurality of dummy load circuits 31a-31c for applying electric load to the liquid drop discharging heads 8, and analog switches 32a-32c, 33a-33c for switching, in accordance with the type of the operating liquid drop discharging head 8, the dummy load circuits connected to the liquid drop discharging heads 8.
NAKAMURA SHINICHI
TAKANO YUTAKA
YAMADA YOSHIAKI
Masatake Shiga
Masakazu Aoyama