LIQUID JET HEAD, LIQUID JET DEVICE, AND METHOD FOR MANUFACTURING LIQUID JET HEAD

Japanese Patent JP2015166160

A

PROBLEM TO BE SOLVED: To provide a liquid jet head, a liquid jet device, and a method for manufacturing the liquid jet head that reduce breakage at an end portion of an active part.SOLUTION: A liquid jet head comprises: a flow channel formation substrate 10 in which a plurality of pressure generation chambers 12 are arranged in parallel; and a piezoelectric element 300 which includes a first electrode 60 disposed on the flow channel formation substrate 10, a piezoelectric layer 70 disposed on the first electrode 60, and a second electrode 80 disposed on the piezoelectric layer 70. The piezoelectric element 300 includes an active part 310 interposed between the first electrode 60 and the second electrode 80. The second electrode 80 is a common electrode disposed continuously in a juxtaposition direction of the pressure generation chambers 12 across a plurality of active parts 310, and its end portion in a direction intersecting the juxtaposition direction forms an end portion of the active part 310. At least the end portion of the second electrode 80 forming the active part 310 is subjected to plasma treatment in an atmosphere containing reductive gas.

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NAKAYAMA MASAO

JP2014041338A

September 24, 2015

March 04, 2014

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SEIKO EPSON CORP

B41J2/14; B41J2/16

JP2011110784A	2011-06-09
JP2009226660A	2009-10-08
JPH0472724A	1992-03-06
JPH0494121A	1992-03-26
JP2013158909A	2013-08-19
JP2010228268A	2010-10-14

US20020113846A1

2002-08-22

Masahiko Ueyanagi
Kazuaki Watanabe

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