Title:
LIQUID METAL ION SOURCE
Document Type and Number:
Japanese Patent JP2004273393
Kind Code:
A
Abstract:
To realize improvement in direction accuracy or the like when securing a needle-shaped body to a filament.
In a reserver 1, a liquid metal to be ionized is accommodated. To a reserver 1, a needle-shaped body 2 whose surface is wet by a melted liquid metal is connected. At the intermediate part of a filament 40 to heat the liquid metal, a loop part 30L is formed, and the needle-shaped body 2 is secured at two points of the loop part 30L.
Inventors:
NIWADA AKIRA
AOTA NAOKI
MIZUNO TOKUO
AOTA NAOKI
MIZUNO TOKUO
Application Number:
JP2003066360A
Publication Date:
September 30, 2004
Filing Date:
March 12, 2003
Export Citation:
Assignee:
JEOL LTD
NIPPON DENSHI ENG
NIPPON DENSHI ENG
International Classes:
H01J27/26; H01J37/08; (IPC1-7): H01J27/26; H01J37/08