Title:
LIQUID RECOVERING STRUCTURE OF LIQUID MATERIAL VAPORIZING AND SUPPLYING DEVICE
Document Type and Number:
Japanese Patent JPH11267492
Kind Code:
A
Abstract:
To completely recover a liq. from a liq. material recovering tank.
The receiving tank 32 of a vaporizing part 30 is arranged right over the feed liq. tank 22 of a liq. feed part 20, and the bottom of the receiving tank 32 is connected to the feed liq. tank 22 through a vertically extended pipeline 40, thus the liq. material vaporizing and supplying device 10 is constituted. When the liq. in the receiving tank 32 has to be recovered, the liq. is naturally recovered in the feed liq. tank 22 through the pipeline 40 by gravity.
Inventors:
SASAKI AKIRA
Application Number:
JP9067998A
Publication Date:
October 05, 1999
Filing Date:
March 20, 1998
Export Citation:
Assignee:
AERA JAPAN LTD
International Classes:
H01L21/205; B01J7/02; C23C16/44; C23C16/448; (IPC1-7): B01J7/02; C23C16/44; H01L21/205
Attorney, Agent or Firm:
Yohei Kinoshita (1 person outside)
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