To inspect the amount of discharge of a treatment liquid by a simple method without putting an operator's arm into a device, and without adversely affecting the device and a product.
There are provided: a vessel 37 that takes out a nozzle 17 from a nozzle standby means 33 for allowing the nozzle 17 from which the treatment liquid is discharged to stand by, moves the nozzle 17 to a prescribed position for supplying the treatment liquid in an object 10 to be treated that is rotated for drive, and stores the treatment liquid discharged from the nozzle 17 at the lower position of the nozzle 17 in the nozzle standby means 33 when the treatment liquid is supplied to the object 10 to be treated via the nozzle 17; a measuring means 41 for measuring the total weight of the vessel 37 containing the treatment liquid discharged into the vessel; and a control unit 43 for obtaining the discharge amount of the treatment liquid from the nozzle 17, based on a measurement result by the measuring means 41.
COPYRIGHT: (C)2008,JPO&INPIT
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu
Kiyozumi Yazawa