Title:
液供給装置
Document Type and Number:
Japanese Patent JP5853971
Kind Code:
B2
Inventors:
Takahiro Okubo
Seiya Totsuka
Seiya Totsuka
Application Number:
JP2013040814A
Publication Date:
February 09, 2016
Filing Date:
March 01, 2013
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B05C11/10; G03F7/16
Domestic Patent References:
| JP3115267U | ||||
| JP11033471A | ||||
| JP2003185053A |
Attorney, Agent or Firm:
Toshio Inoue
Tomoaki Miida
Tomoaki Miida