LOADING AND UNLOADING STATION FOR SEMICONDUCTOR PROCESSING APPARATUS

Title:

LOADING AND UNLOADING STATION FOR SEMICONDUCTOR PROCESSING APPARATUS

Document Type and Number:

Japanese Patent JP2001203252

Kind Code:

A

Abstract:

To ensure loading from a transporting container to a semiconductor processing apparatus under clean room conditions.

The loading and unloading station for the semiconductor processing apparatus having closable loading openings is capable of loading, unloading and reloading discs in a transporting container 6 through the loading opening after eliminating a closure 12, the container 6 has a container cover 15, the cover 15 extends in the direction approximately normal to a loading and unloading plane 10, the container 6 is fixed to the closure 12 by frictional coupling through the cover 15, the opening and the container 6 are simultaneously opened by lowering the cover 15 and the closure 12 together into the semiconductor processing apparatus, and the loading and unloading are performed by engaging them in the container 6 through a manipulator 22 inside the processing apparatus.

Inventors:

MAGES ANDREAS
SCHELER WERNER
BLASCHITZ HERBERT
SCHULZ ALFRED
SCHNEIDER HEINZ

Application Number:

JP2000373483A

Publication Date:

July 27, 2001

Filing Date:

March 25, 1996

Export Citation:

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Assignee:

BROOKS AUTOM INC

International Classes:

B65G1/00; B65G49/00; B65G49/07; B65D85/86; H01L21/00; H01L21/673; H01L21/677; (IPC1-7): H01L21/68; B65G1/00; B65G49/07

Attorney, Agent or Firm:

Motohiko Fujimura (1 outside)

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