LOCAL CLEANLINESS KEEPING SYSTEM IN CLEAN ROOM

Japanese Patent JP3799538

B2

PROBLEM TO BE SOLVED: To keep a part in the vicinity of a device in a very clean condition so as not to pollute the inside of the device because the inside of the device is exposed outside during the maintenance of the device in the clean localization of a clean room, and to prevent the pollutant generated during the maintenance from being diffused in the peripheral environment of a production device. SOLUTION: An air outlet part 5 forming an air curtain is installed in a lattice manner on a ceiling of a clean room, and the air is supplied from a desired air outlet part to constitute a space S surrounded by an air curtain 17 downward of the ceiling. The ceiling can comprise ceiling units forming the air outlet part to form the air curtain therearound which are arranged lengthwise and crosswise.