To provide a localized surface plasmon resonance device having a high-accuracy recessed and projecting pattern by utilizing imprint technology.
The method for producing a localized surface plasmon resonance sensor unit includes the steps of (I) applying a resin solution to a mold 10 having a recessed and projecting pattern shape and drying the same to form a resin layer 20 having a shape transfer surface to which the recessed and projecting pattern shape is transferred, (II) bringing a metal ion-containing solution into contact with the resin layer and impregnating the resin layer with the metal ion, (III) reducing the metal ion and precipitating the metal on the surface of the resin layer including the shape transfer surface to form a metal precipitation layer 40, (IV) forming a metal plating layer 50 by performing non-electrolytic plating and/or electroplating on the metal precipitation layer, (V) forming a metal thin film laminate 100 having the recessed and projecting pattern shape by removing the resin layer, (VI) performing displacement noble metal plating on the surface layer of the metal thin film laminate to obtain a noble metal thin film layer 60 having the recessed and projecting pattern shape which generate localized surface plasmon resonance.
ENOMOTO YASUSHI
Kazuhiro Watanabe
Tatsuya Josawa