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Title:
MATERIAL FOR FORMING Bi BASED FERROELECTRIC THIN FILM, Bi BASED FERROELECTRIC ELEMENT AND METHOD FOR PRODUCING THE ELEMENT
Document Type and Number:
Japanese Patent JP2002029753
Kind Code:
A
Abstract:

To provide a material excellent in saturation characteristics under low temperature firing conditions or under short time firing conditions by a rapid heating method and capable of producing a Bi based ferroelectric element having a hysteresis curve with a good squareness ratio, a high polarization value (Pr value) and improved hysteresis characteristics and to provide a Bi based ferroelectric element using the material and a method for producing the element.

The material for forming a Bi based ferroelectric thin film contains a halogen element. A Bi system ferroelectric thin film formed by applying the material is provided. In the method for producing a Bi based ferroelectric element, the element is produced using the thin film by a rapid heating method.


Inventors:
SATO YOSHIMI
KAWAKAMI ATSUSHI
KUMAGAI TOMOYA
Application Number:
JP2000216353A
Publication Date:
January 29, 2002
Filing Date:
July 17, 2000
Export Citation:
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Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
C01G35/00; H01B3/12; H01L21/316; H01L21/8246; H01L27/105; (IPC1-7): C01G35/00; H01B3/12; H01L21/316; H01L27/105
Attorney, Agent or Firm:
Yoko Hasegawa