Title:
MEMS素子とその製造方法、光変調素子、GLVデバイスとその製造方法、及びレーザディスプレイ
Document Type and Number:
Japanese Patent JP3558066
Kind Code:
B2
Abstract:
The present invention provides a MEMS device and methods for manufacturing thereof, in which planarizing the surface of a beam and improving performance of the MEMS device are aimed. In addition, the present invention provides a light modulation device and a GLV device in which this MEMS device is used, and methods for manufacturing thereof; and further, a laser display using this GLV device. According to the present invention, a MEMS device includes a substrate side electrode and a beam that is disposed so as to oppose the substrate side electrode and is driven by electrostatic attraction force or electrostatic repulsion force that acts between the substrate side electrode and the driving side electrode, with the substrate side electrode being formed of a single-crystalline semiconductor layer.
Inventors:
Hiroto Kasai
Application Number:
JP2002042029A
Publication Date:
August 25, 2004
Filing Date:
February 19, 2002
Export Citation:
Assignee:
ソニー株式会社
International Classes:
B81B3/00; G02B26/08; (IPC1-7): G02B26/08
Domestic Patent References:
| JP5501615A | ||||
| JP2002023070A | ||||
| JP5188308A | ||||
| JP2002267958A | ||||
| JP7063999A | ||||
| JP7220994A |
Attorney, Agent or Firm:
Yoshitsuno Kakuda
Hironobu Isoyama
Hidemori Matsukuma
Hironobu Isoyama
Hidemori Matsukuma
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