Title:
A MEMS element and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6151541
Kind Code:
B2
Inventors:
Takahide Usui
Application Number:
JP2013054857A
Publication Date:
June 21, 2017
Filing Date:
March 18, 2013
Export Citation:
Assignee:
New Japan Radio Co., Ltd.
International Classes:
B81B3/00; B81C1/00; H04R19/04; H04R31/00
Domestic Patent References:
| JP2011234227A | ||||
| JP8506857A |
Foreign References:
| US6538798 | ||||
| WO2009104389A1 |
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