Title:
ＭＥＭＳセンサ
Document Type and Number:
Japanese Patent JP6721900
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a technique for performing texture measurement with single MEMS sensor.SOLUTION: A texture measurement MEMS sensor 1 comprises a translucent elastic member 4, at least one detector element 5 embedded into the translucent elastic member 4, and a light source 6 for irradiating an object. The detector element 5 includes: two terminals 54A, 54B on a semiconductor layer 52 via an insulation layer 53; a cantilever 55 having an end connected to the semiconductor layer 52 and deforming according to contact of an object to the translucent elastic member 4; and a strain gauge 56 provided on the cantilever 55 and having ends connected to the two terminals 54A, 54B. The MEMS sensor 1 detects a contact force based on a change in DC resistance between the two terminals 54A, 54B, and detects, based on an AC impedance change between the two terminals 54A, 54B, at least one of a reflection spectrum from the object and the temperature of the object.SELECTED DRAWING: Figure 3
More Like This:
Inventors:
Masayuki Samukawa
Application Number:
JP2016087136A
Publication Date:
July 15, 2020
Filing Date:
April 25, 2016
Export Citation:
Assignee:
Niigata University
International Classes:
G01D21/02; G01L5/16; G01N21/27; G01N27/02; G01N27/04
Domestic Patent References:
| JP201587129A | ||||
| JP2015166716A | ||||
| JP9325079A | ||||
| JP2017198472A |
Foreign References:
| US20100148286 |
Attorney, Agent or Firm:
Kenji Sugimura