To provide a macro lighting system, a visual inspection apparatus, and a visual inspection method of a substrate capable of irradiating a substrate to be inspected at a uniform brightness with a plurality of light sources by adjusting the brightness of the illumination light emitted from the plurality of light sources.
The macro lighting system comprises a plurality of light source units 4a and 4b for emitting the illumination light F. The light source units 4a and 4b have a light source 8 for emitting the illumination light F, and a dimming means 9 for adjusting light. With reference to the brightness of the illumination light F emitted from one of the plurality of light source units 4a and 4b, the dimming means 9 adjusts the brightness of the illumination light F emitted from the others of the light sources 4a and 4b to provide substantially equal brightness.
| JP2001091469A | 2001-04-06 | |||
| JP2006194896A | 2006-07-27 | |||
| JP2004335199A | 2004-11-25 | |||
| JPH09273996A | 1997-10-21 | |||
| JPH01297534A | 1989-11-30 | |||
| JPH09204050A | 1997-08-05 | |||
| JP2006006803A | 2006-01-12 |
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui
Next Patent: NAVIGATION DEVICE, ITS METHOD, ITS PROGRAM, AND RECORDING MEDIUM