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Title:
MAGNETIC ANNEALING DEVICE
Document Type and Number:
Japanese Patent JP2014183279
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a magnetic annealing device capable of performing magnetic annealing processing with both a perpendicular magnetization method and an in-plane magnetization method.SOLUTION: A magnetic annealing device 100 for magnetically annealing a workpiece held in a workpiece holder 128 using a horizontal superconducting magnet as magnetic field generating means comprises a housing container which houses the workpiece before magnetic annealing processing and a workpiece transfer mechanism 124 which transfers the workpiece held in the housing container to the workpiece holder 128. The workpiece transfer mechanism 124 can hold the workpiece not only in a horizontal state but also in a vertical state.

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Inventors:
ONO YUJI
ISHII TORU
SAITO MAKOTO
OBARA YOSHITSURU
TAKEUCHI YASUSHI
Application Number:
JP2013058324A
Publication Date:
September 29, 2014
Filing Date:
March 21, 2013
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/677; F27B17/00; F27D3/12
Domestic Patent References:
JP2004263206A2004-09-24
JP2012146984A2012-08-02
JP2001068527A2001-03-16
JP2002175998A2002-06-21
JP2008235934A2008-10-02
JP2010050301A2010-03-04
JP2006295159A2006-10-26
JP2004214392A2004-07-29
JPH1022192A1998-01-23
JPH0878349A1996-03-22
Foreign References:
WO2010074130A12010-07-01
WO2012000663A12012-01-05
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito



 
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