Title:
MAGNETIC BEARING DEVICE AND VACUUM PUMP
Document Type and Number:
Japanese Patent JP2015132340
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a magnetic bearing device and a vacuum pump including the magnetic bearing device, capable of keeping a suitable S/N ratio relating to a displacement signal of a rotor even in a case when a large current flows only to one of opposed electromagnetic coils.SOLUTION: A signal Ip, a signal Im and a signal originating in a sum signal Ip+Im are input to a correction processing operation portion 415 of a control portion 44 of a vacuum pump. The signal originating in the sum signal IP+IM is a displacement signal, and includes error originating in non-linearity of magnetic characteristics of the electromagnetic core of a magnetic bearing. The signal Ip and the signal Im are converted into correction signals to eliminate the error included in the displacement signal. By subtracting the correction signals from the displacement signal, a true estimated displacement signal can be obtained.
More Like This:
| JP3259404 | VIBRATION RESTRAINING DEVICE FOR ROTOR |
| WO/1985/005417 | CONTROLLED RADIAL MAGNETIC BEARING DEVICE |
| JPH08296645 | MAGNETIC BEARING DEVICE |
Inventors:
OZAKI JUNICHIRO
Application Number:
JP2014004428A
Publication Date:
July 23, 2015
Filing Date:
January 14, 2014
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F16C32/04; F04D19/04
Domestic Patent References:
| JP2009174646A | 2009-08-06 | |||
| JP2001177919A | 2001-06-29 | |||
| JP2012219991A | 2012-11-12 | |||
| JP2006308074A | 2006-11-09 | |||
| JP2013130180A | 2013-07-04 |
Attorney, Agent or Firm:
Fuyuki Nagai
Previous Patent: INERTIA TRAVEL CONTROL UNIT AND INERTIA TRAVEL CONTROL METHOD
Next Patent: FIXING MEMBER
Next Patent: FIXING MEMBER