To provide a magnetic field calibration method for accurately and stably implementing a magnetic field calibration in comparison with a calibration using a hall element and a probe.
The magnetic field calibration method of the invention is sequentially provided with: a first process for measuring a magnetic field characteristic of a magnetoresistive element, and obtaining a first magnetic field characteristic; a second process for placing the magnetoresistive element on a stage of a magnetic field applying means; a third process for adjusting a height of the stage so as to match a surface height of the magnetoresistive element with a surface height of a to-be-measured wafer during a normal measurement; and a fourth process for causing the magnetic field applying means to apply a magnetic field to the magnetoresistive element in the in-plane direction, and obtaining a second magnetic field characteristic. In the fourth process, the magnetic field applied to the magnetoresistive element is adjusted so as to match substantially the first magnetic field characteristic with the second magnetic field characteristic.
NAGASU KATSUFUMI
AIZAWA TAKUYA
NAKAO SATORU
| JPH0950601A | 1997-02-18 | |||
| JPH09128836A | 1997-05-16 | |||
| JP2001337146A | 2001-12-07 |
Tadashi Takahashi
Takashi Watanabe