Title:
MAGNETIC SENSOR
Document Type and Number:
Japanese Patent JP2015212713
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a magnetic sensor capable of separately detecting magnetic field components obtained by mixing at least a magnetic field perpendicular to and a magnetic field parallel to a substrate.SOLUTION: A magnetic sensor that detects triaxial magnetism orthogonal to each other, comprises: a magnetic detection part 50a or 50b including a magnetic sensitive material for detecting a magnetic field component in a first axial direction; and magnetic field direction conversion parts 60a, 60b converting, into a magnetic field component in a first axial direction, a magnetic field component in a second axial direction orthogonal to the first axial direction, and a magnetic field component in a third axial direction orthogonal to both the first and second axial directions.
Inventors:
YAMASHITA MASAYA
YAMAGATA AKIRA
TANAKA TAKESHI
MIKOSHIBA NORIHIKO
YAMAGATA AKIRA
TANAKA TAKESHI
MIKOSHIBA NORIHIKO
Application Number:
JP2015159460A
Publication Date:
November 26, 2015
Filing Date:
August 12, 2015
Export Citation:
Assignee:
ASAHI KASEI DENSHI KK
International Classes:
G01R33/02; G01R33/09; H01L43/08
Domestic Patent References:
| JPWO2009048018A1 | 2011-02-17 |
Attorney, Agent or Firm:
Tetsuya Mori
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