Title:
MAGNETO-RESISTANCE SENSOR
Document Type and Number:
Japanese Patent JPH08213238
Kind Code:
A
Abstract:
PURPOSE: To provide a magneto-resistance sensor excellent in performance by a method wherein the magnetic free layer of a spin bulb element is formed of amorphous material of Co-Zr.
CONSTITUTION: An Si board 9 is used, a Ta ground layer 8 is formed thereon, a magnetic free layer 7 formed of Co-Zr-Nb, Co-Zr-Ta, Co-Zr-Re or Co-Zr-Mo is provided onto the Ta ground layer 8, and a non-magnetic conductive layer 6 of Cu, a magnetic fixed layer 5 of Co, an antiferromagnetic layer 4 of Fe-Mn, and a protective layer 10 of Ta are successively laminated thereon. Therefore, a magneto-resistance sensor high in an MR ratio in a low magnetic field can be obtained.
Inventors:
NAGAI HIDEYASU
Application Number:
JP1733095A
Publication Date:
August 20, 1996
Filing Date:
February 03, 1995
Export Citation:
Assignee:
SUMITOMO METAL IND
International Classes:
G01R33/09; G11B5/39; H01F10/12; H01F10/13; H01F10/30; H01F10/32; H01L43/08; H01L43/10; (IPC1-7): H01F10/30; G01R33/09; G11B5/39; H01L43/08; H01L43/10
Attorney, Agent or Firm:
Tono Kono