Title:
メンテナンス部材、基板保持モジュール、めっき装置、および、メンテナンス方法
Document Type and Number:
Japanese Patent JP7421366
Kind Code:
B2
Abstract:
Provided is a maintenance member or the like capable of easily maintaining an electric contact in a substrate holder. It relates to a maintenance member to maintain a substrate holder including an electric contact configured to supply power to a substrate. The maintenance member includes an abrasive body having a shape corresponding to the substrate that is a holding target of the substrate holder, and disposed to come in contact with the electric contact when held by the substrate holder.
Inventors:
Masayuki Satake
Application Number:
JP2020027351A
Publication Date:
January 24, 2024
Filing Date:
February 20, 2020
Export Citation:
Assignee:
Ebara Corporation
International Classes:
H01L21/683; C25D7/12; C25D17/00; C25D21/00; C25D21/12
Domestic Patent References:
| JP2014019900A | ||||
| JP2018119176A |
Attorney, Agent or Firm:
Toru Miyamae
Yukio Kanegae
Makoto Watanabe
Obata Tosho
Yukio Kanegae
Makoto Watanabe
Obata Tosho
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