Title:
Manufacture of Trichlorosilane
Document Type and Number:
Japanese Patent JP6239753
Kind Code:
B2
Abstract:
The selectivity of a process for preparing trichlorosilane (TCS) by reaction of metallurgical silicon (mg-Si) and HCl, is improved by utilizing mg-Si having a titanium content greater than 0.06 wt %.
Inventors:
Sobota, Marek
Anne, Albert
Anne, Albert
Application Number:
JP2016530430A
Publication Date:
November 29, 2017
Filing Date:
July 22, 2014
Export Citation:
Assignee:
Wacker Chemie AG
International Classes:
C01B33/107
Domestic Patent References:
| JP6234776A | ||||
| JP2006100255A |
Other References:
LOBREYER, T., et al.,SILICON FOR TRICHLOROSILANE PRODUCTION BASIC RESEARCH AND DEVELOPMENT,SILICON FOR THE CHEMICAL INDUSTRY III,ノルウェー,NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY,1996年 6月18日,p.147-155
前田正史,高純度シリコンのマーケットとその製造技術,生産研究,1986年 9月,第38巻,第9号,第425-433頁,特に第431頁、表9
前田正史,高純度シリコンのマーケットとその製造技術,生産研究,1986年 9月,第38巻,第9号,第425-433頁,特に第431頁、表9
Attorney, Agent or Firm:
Kawaguchi International Patent Office
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