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Patent Searching and Data


Title:
MANUFACTURE OF DISPLAY
Document Type and Number:
Japanese Patent JP2000323721
Kind Code:
A
Abstract:

To increase the yield while reducing the cost by employing a second element which receives the output from a first element for selecting a pixel and supplies a voltage to a pixel thereby eliminating a driver IC.

An amorphous silicon or polysilicon film is formed by depositing a gate insulation film and a first insulator layer serving as an interlayer insulator and then it is patterned. A silicon nitride film, or the like, is then formed using a mask such that an etching stopper overlaps a select line. Subsequently, an impurity doped semiconductor film is formed and patterned to define a semiconductor region 602 of a first element. Thereafter, a second insulation film is formed, the activated semiconductor film of a second element is patterned to form an etching stopper and an impurity doped semiconductor film is formed and patterned thus defining the semiconductor region 605 of a second element. Furthermore, a voltage supply line 606 is formed of a metallic material followed by formation of the drain and contact of the second element.


Inventors:
TAKEMURA YASUHIKO
Application Number:
JP2000101571A
Publication Date:
November 24, 2000
Filing Date:
October 29, 1991
Export Citation:
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Assignee:
SEMICONDUCTOR ENERGY LAB
International Classes:
G02F1/136; G02F1/133; G02F1/1368; G09F9/30; H01L21/336; H01L29/786; (IPC1-7): H01L29/786; G02F1/1368; G09F9/30; H01L21/336