Title:
MANUFACTURE OF INTEGRATED PHOTOELECTRIC CONVERSION ELEMENT
Document Type and Number:
Japanese Patent JPH07211928
Kind Code:
A
Abstract:
PURPOSE: To reduce the leakage current between units in an integrated photoelectric conversion element in which a plurality of units of photoelectric conversion elements which are connected in series are provided on a substrate.
CONSTITUTION: An insulating thin film 17 composed of a silicon oxide is formed at the leakage current generating part of a groove section 16 by applying a reverse bias voltage across photoelectric conversion layers 12 and 22 in the atmosphere of a mixed gas of a silane gas and oxygen gas.
Inventors:
HISHIKAWA YOSHIHIRO
ISOMURA MASAO
ISOMURA MASAO
Application Number:
JP589194A
Publication Date:
August 11, 1995
Filing Date:
January 24, 1994
Export Citation:
Assignee:
SANYO ELECTRIC CO
International Classes:
H01L31/04; (IPC1-7): H01L31/04
Attorney, Agent or Firm:
Contents Makoto (1 person outside)