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Patent Searching and Data


Title:
MANUFACTURE FOR MAGNETIC BUBBLE ELEMENT
Document Type and Number:
Japanese Patent JPS5873089
Kind Code:
A
Abstract:

PURPOSE: To change the thickness of insulation layer at location and to avoid defective insulation, by providing the 2nd insulating layer on the 1st insulating layer and removing the 2nd insulating layer selectively, in the manufacture of a two-layer conductor current drive magnetic bubble element.

CONSTITUTION: The 1st conductor layer 1 is formed on a thin magnetic substance film on a nonmagnetic garnet substrate and an SiO2 insulation film 2 and a polyimide resin insulation film 3 are sequentially formed. A polyimide resin film 3 on a pattern region 4 is selectively removed by using a mask 5 of organic resist and the 2nd conductor layer 6 is formed after the removal of the mask 5. Thus, since the insulation layer other than the pattern region 4 performing the generation, storage and detection of bubbles, has two-layer construction consisting of the SiO2 film 2 and polyimide resin film 3, no defective insulation is caused even if the SiO2 film has defects due to a pin holes and minute dusts, and allowing to improve the yield.


Inventors:
TSURUOKA TAIJI
Application Number:
JP17135281A
Publication Date:
May 02, 1983
Filing Date:
October 28, 1981
Export Citation:
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Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
G11C11/14; G11C19/08; (IPC1-7): G11C11/14; G11C19/08
Attorney, Agent or Firm:
Keiichi Yamamoto