MANUFACTURE OF NON-EVAPORATION TYPE GETTER - JAPAN METALS & CHEM CO LTD

Title:

MANUFACTURE OF NON-EVAPORATION TYPE GETTER

Document Type and Number:

Japanese Patent JPH04315730

Kind Code:

A

Abstract:

PURPOSE: To provide a method of providing a non-evaporation type getter which is not affected by the material and shape thereof and which has high adsorption speed and a large amount of adsorption.

CONSTITUTION: Getter powder material 2 made by more than one kind of metal selected from Ti, Zr, Cr, V, Nb, Ta, W, Mo; Th, Ca, Al, Ni, Mn and Fe or its alloy is introduced into a pressure-reduced plasma generator 1 for high-frequency plasma or the like together with a carrier gas 3 of H2 or Ar and is flame sprayed over and covers the surface of a base 5 of a composite carbon material containing a Cu group alloy and/or carbon fibers and placed inside a boose 4 in which an inert gas atmosphere of Ar or He is introduced.

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Inventors:

NARISHIMA KATSUYA
SATO YOSHIHIRO
AOKI SHIRO
SUMIKAKE SHIGERU

Application Number:

JP10657191A

Publication Date:

November 06, 1992

Filing Date:

April 12, 1991

Export Citation:

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Assignee:

JAPAN METALS & CHEM CO LTD
NIPPON GETSUTAAZU KK
NARISHIMA KATSUYA

International Classes:

H01J7/18; A47J41/02; H01J9/39; H05H7/00; (IPC1-7): H01J7/18

Attorney, Agent or Firm:

Junzo Ogawa (1 person outside)

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