Title:
MANUFACTURE OF PHOTOELECTRIC CONVERSION ELEMENT
Document Type and Number:
Japanese Patent JPS61265875
Kind Code:
A
Abstract:
PURPOSE:To prevent the deterioration in characteristics of photoelectric conversion element by a method wherein the second metallic film is laid between the first metallic film as the lower metallic electrode and the third metallic film as the bonding pad. CONSTITUTION:Metallic films 2, 3 and 4 are successively filmed on an insulating substrate 1. The first metallic film 2 as the lower electrode; the second metallic film 3; and the third metallic film 4 as the bonding pad are respectively made of chrome; titanium or palladium; and gold or aluminium. Firstly the metallic films, 2, 3, 4 are etched into specified pattern. Secondly the metallic films, 3, 4 excluding the bonding pad forming region are etched away. Successively a semiconductor film 5 is formed on the insulating substrate 1 and the metallic film 2 and then a transparent electrode 6 is formed in contact with the semiconductor film 5. Even if the temperature of substrate 1 is raised by the metallic film 3, the temperature can be prevented from diffusing in the space between the metallic films 2 and 4. Resultantly and deterioration in wire bonding strength can be prevented by means of restraining any defect due to metallic cover fixing operation from occurring.
Inventors:
CHIYOMA HITOSHI
WATANABE ZENSAKU
KIDA KUNIAKI
WATANABE ZENSAKU
KIDA KUNIAKI
Application Number:
JP10695585A
Publication Date:
November 25, 1986
Filing Date:
May 21, 1985
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01L29/40; H01L21/60; H01L31/0224; H01L31/0248; H01L31/10; (IPC1-7): H01L21/28; H01L21/60; H01L31/08
Attorney, Agent or Firm:
Noriyuki Noriyuki
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