Title:
MANUFACTURE OF PIEZOELECTRIC ACTUATOR AND MANUFACTURE OF INK-JET HEAD
Document Type and Number:
Japanese Patent JP3820665
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To manufacture piezoelectric actuators for ink-jet heads inexpensively with good yield without carrying out machining.
SOLUTION: According to the manufacture of piezoelectric actuators for ink-jet heads, a plurality of mold holes 50 are opened in a photoresist layer 44 layered on a substrate 18, and a piezoelectric slurry 52 is filled in the mold holes 50, which is then baked. The photoresist layer 44 is burnt off. A piezoelectric member 56 left on the substrate 18 is polarized, whereby actuators 22 are obtained.
Inventors:
Hero Yasutomi
Application Number:
JP3183497A
Publication Date:
September 13, 2006
Filing Date:
February 17, 1997
Export Citation:
Assignee:
Konica Minolta Holdings Co., Ltd.
International Classes:
B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/145; B41J2/16; H01L41/09; H01L41/22; (IPC1-7): B41J2/045; B41J2/055; B41J2/16; H01L41/09; H01L41/22
Domestic Patent References:
| JP7081071A | ||||
| JP8025625A | ||||
| JP63004959A |
Attorney, Agent or Firm:
Aoyama Aoi
Yasumichi Furukawa
Takuji Yamada
Atsushi Maeda
Hiroshi Kano
Yasumichi Furukawa
Takuji Yamada
Atsushi Maeda
Hiroshi Kano
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